Janet Anne Yellen, 42, a former federal government anaylst, died of cancer Monday at her home in Bethesda.

Her last position was with the Federal Aviation Administration, where she was a policy information system analyst for about two years until leaving last December.

Born in Hartford, Conn., Miss Yellen was a graduate of the College of New Rochelle in New York and earned a master's degree in mathematics from Trinity College in Hartford.

She was a computer analyst with United Technologies in East Hartford before coming here 12 years ago to serve on the senior staff at Operations Research, Inc., in Silver Spring. Later, she was an analyst at the national Bureau of Standards before joining FAA.

Miss Yellen belonged to numerous organizations, including the Association for Computing Machinery, the Washington Operations Research Council and the Sodality of the Church of the Little Flower.

She is survived by her parents, Mr. and Mrs. Joseph Yellen, of Glastonbury, Conn., a sister, Mrs. William Peterson, of Naperville, Ill., and a brother, Kenneth J., of Tequesta, Fla.

The family suggests that expressions of sympathy may be in the form of contributions to the Vincent Lombardi Cancer Research Center or the Division of Medical Oncology at Georgetown University Hospital.