Thomas J. McCarvill, 62, a former official of the old Atomic Energy Commission who worked on the peaceful uses of nuclear energy, died of emphysema Tuesday at Montgomery General Hospital.

Mr. McCarvill was born in Deerwood, Minn. He studied at the University of Minnesota School of Mines. He joined the federal government during World War II after working as a mining engineer in Honduras and Brazil.

He spent five years with the U.S. military government in Japan and four years in Denver, Colo., before being assigned to the AEC here. He helped direct the agency's uranium exploration program and then joined the Plowshare Program, which was devoted to the peaceful uses of atomic power.

At his retirement in 1973, after 30 years of service, Mr. McCarvill was chief of the operations systems branch in the division of peaceful nuclear explosives in the AEC. The AEC is now the Energy Research and Development Administration, a part of the Department of Energy.

Survivors include his wife, Gladys Windsor, of the home of Damascus; three sons, James T., of Adelphi, William T., Of Wilmington, Del., and John T., of the home, and three brothers, Joseph, of Northome, Minn., Frank, of Superior, Wis., and James, of Minneapolis.

The family suggests that expressions of sympathy be in the form of contributions to the Lung Association of Mid-Maryland, 170 Rollins Ave., Rockville, Md., 20852, or to a favorite charity.