Harold G. Williams, 65, a Central Intelligence Agency officer for more than 25 years, died of cancer July 20 at the Swedish Hospital in Seattle, Wash.

Mr. Williams was born in Edmonton, Alberta, and grew up in Seattle. He earned a bachelor's degree from the University of Washington and then earned master' degrees in history from Washington, Yale and Columbia universities.

He served in Europe in the Navy during World War II. He left the service in 1946 with the rank of lieutenant commander and joined the Central Intelligence Group, a predecessor of the CIA, in the same year.

His assignments included 14 years of overseas duty, most of it in Europe, in addition to work in Washington. He and his wife, Jean, maintained a home in Washington from 1946 to 1953, and in Bethesda from 1953 to 1972, when they retired to Seattle.

Mr. Williams had served as a consultant to the Batelle Institute, an international affairs organization, in Seattle until his second retirement last January for reasons of health.

In addition to his wife, of the home in Seattle, Mr. Williams is survived by a son, Timothy E., of Anchorage, Alaska.

The family suggests that expressions of sympathy be in the form of contributions to the Fred Hutchinson Cancer Research Center, Seattle.