Raymond R. Dickey, 63, a well-known attorney who had been a member of one of the most influential law firms in Washington, died of cancer Friday at the Washington Hospital Center.

He left the firm of Danzansky, Dickey, Tydings, Quint and Gordon as a senior partner in February 1980, to set up a law office with his wife, Margaret L. Dickey, also a lawyer, and another attorney, Robert D. Roadman. Mr. Dickey was senior partner of the firm, Dickey, Roadman and Dickey until his death.

Active in Republican Party affairs and many civic organizations, Mr. Dickey had first entered into partnership with the late Joseph B. Danzansky, a friend from school days, when he joined the firm of Buckley and Danzansky in 1945.

Two years later, he left the private practice of law to become chief counsel of the Senate Small Business Committee. In 1949-50, he was in Paris as a special advisor to Averell Harriman, who was serving as special representative in Europe of the Economic Cooperation Administration.

Mr. Dickey then returned to Washington to team up again with Mr. Danzansky in the law firm of Danzansky and Dickey. He took a year out in 1954 to be general counsel of the U.S. Information Agency. In 1969, the firm was succeeded by Danzansky, Dickey, Tydings, Quint and Gordon.

When he left the firm in 1980, Mr. Dickey cited philosophical differences.

He said he wanted to maintain a small to medium-sized practice while the other partners wanted it to grow. His friend, Mr. Danzansky, had died the previous November. The firm later merged with a New York firm and no longer exists.

Mr. Dickey was born in Washington. He attended George Washington University and then worked in the antitrust division at the Justice Department while earning a law degree at Southeastern University. He was admitted to practice before the D.C. bar and the U.S. Supreme Court. His first firm was Dickey and Dickey in which he was a partner from 1940 to 1942. He served with the U.S. Army in World War II.

An all-out supporter of Dwight D. Eisenhower, he played an important role at the 1952 Republican convention in helping seat pro-Eisenhower delegates from Southern states. In 1954-55, he was a member of the Attorney General's National Committee to Study Antitrust Laws. He also had been on the Real Estate Advisory Committee to the U.S. Securities and Exchange Commission in 1972-73.

He had been treasurer, and director and counsel to the San Juan Racing Association since it was founded in 1954. In 1957, it was alleged that two men in Miami, Fla., had hired another man to beat up Mr. Dickey because they were disgruntled over construction contracts involving a race track in San Juan, financed by the association. The plan fell through and the two later were convicted of conspiracy and sentenced to jail. Mr. Dickey escaped harm.

As general counsel to the Metropolitan Board of Trade, Mr. Dickey had been active in the growth of the Greater Washington business community. He was the author of numerous articles in his field.

He belonged to the D.C. Federal and American Bar associations, the National Lawyers Club, the National Press Club and the 1925 F Street Club. He was on the board of the D.C. Citizens Crime Committee.

Marriages to the former Jennie Lee and to the former Hilda Finch ended in divorce.

He is survived by his wife, Margaret L. Dickey of Washington; a daughter by his first marriage, Jean Bonde of Potomac; four children by his second marriage, Diane of Los Angeles, David R. of Baltimore, Douglas F. of Washington, and Christopher B. of Minneapolis; a sister, Mrs. John Beaton of St. Croix, Virgin Islands, and four grandchildren.

The family suggests that expressions of sympathy be in the form of contributions to Children's Hospital.