Henry R. Carley Sr., 75, who retired in 1975 as a staffing specialist in the office of the administrative law judges of the Civil Service Commission, died Saturday at his home in Kensington. He had Parkinson's disease.

Mr. Carley joined the CSC in Washington in 1957 as an investigator. Prior to that, he had served as a civilian employe of the U.S. government in Germany for nine years.

He was chief of operations for the criminal investigations division of the Army in Munich. He also was clerk of the court for the U.S. Courts of Germany under the State Department in charge of court personnel for Upper Bavaria. As a civilian, he was assistant military governor of Munich and military governor of Munich and military govenor of Fuerstenfeldbruch, an air base, with jurisdiction over 67 cities and towns.

Mr. Carley was born in Boston. He was a graduate of Suffolk University Law School and worked as a policeman, lawyer and private investigator in Boston until going to Germany after World War II.

Survivors include his wife, Kathleen, of Kensington; a son, Henry R., Jr., of Silver Spring; five daughters, Kathleen M. Miller of Silver Spring, Corinne M. Kern of Wheaton, Sheila A. Henry of Marion, Mass., Aureen C. Bussink of Annapolis, and Maryann C. Arnsmeyer of Philadelphia; two brothers, John D., of Boston, and John F., of Rockville, and 15 grandchildren.