Walter C. Baugh Jr., 34, a lawyer and physicist who was an attorney with the legal counsel division in the Equal Employment Opportunities Commission's office of general counsel, died of cancer Saturday in his home in Falls Church.

Mr. Baugh had worked for the EEOC since February 1978. Prior to that, he had been a physicist for several years with the Food and Drug Administration's Bureau of Radiological Health. In June 1981, he was awarded a director's citation for his work with the FDA.

He was active in church and volunteer groups. He had been board president of LAOS, an ecumenical volunteer service organization, since 1979. He was board vice president in 1978.

Mr. Baugh had been board chairman of the George Washington University Wesley Foundation from 1977 to 1981, and was honorary chairman of the Ecumenical Christian Ministry of George Washington University. He was member of the United Church in Washington.

He was born in Bluefield, W.Va., and reared in Tazewell, Va. He was a resident of Falls Church. He attended the University of Virginia where he graduated with high distinction in 1970. He earned a master's degree in physics a year later at Cornell University.

Mr. Baugh then came to Washington and worked for the government by day and studied law by night. He graduated from Catholic University's law school in 1976, winning an American Jurisprudence Award for his work in constitutional law.

During the last months of his life, Mr. Baugh was admitted to practice law before the U.S. Supreme Court, spoke to church groups about cancer and its effects, and made a pilgrimage to the gravesite of Martin Luther King Jr. in Atlanta.

Mr. Baugh's survivors include his wife Martha Dofflemyer Baugh, and three children, Philip Andes, Michael Richards, and Sharon O'Dell Baugh, all of Falls Church, his parents, Mr. and Mrs. Walter C. Baugh Sr. of Tazewell, Va., and a sister, Mary O. Baugh of Silver Spring.

The family suggests that expressions of sympathy be in the form of contributions to LAOS, The Ecumenical Institute, or a memorial fund to be established for Mr. Baugh's children, all in care of Jennifer Johnson, at the Equal Employment Opportunity Commission, 2401 E. St. NW, Washington, 20506.