Dr. Raymond Barzilai, 65, a physician and the deputy director of the division of drug monographs of the Food and Drug Administration, died of cardiac arrest Friday at Suburban Hospital in Bethesda.

Dr. Barzilai, who lived in Bethesda, was born in Alexandria, Egypt. He earns his medical degree at the University of Athens, Greece, and then established a private practice in Alexandria. In 1952, he came to the United States and settled first in New Orleans, where he did a three-year fellowship in internal medicine at the Oschsner Clinic.

In 1955, he moved to Glendale, Md., and was a member of the staff of Glendale Hospital. From 1958 to 1960, when he joined the FDA, he was a lieutenant colonel in the Army Medical Corps stationed at Fort Lee, Va.

At the FDA, Dr. Barzilai was the director of antibiotics certication until about 1970. He then was appointed deputy director of oncology and radiopharmaceuticals. He was a special assistant to the director of drugs at the agency in 1973, when he was appointed the FDA representative to the World Health Organization in Geneva, Switzerland. He returned to FDA headquarters in 1975 and was deputy director of the division of drug monographs from then until his death.

Dr. Barzilai was a past president of the International Society of Chemotherapy.

Survivors include his wife, Angela A. (Kiki), of Bethesda, one daughter, Irene Mary (Renna), also of Bethesda, and three sisters, Alice Misrahi of Montreal, Marcelle Barzillai of Washington and Yvonne Khadr of Alexandria, Egypt.

The family suggests that expressions of sympathy be in the form of contributions to the Heart Fund of the American Heart Association, or to the St. Sophia Greek Orthodox Cathedral, Washington, D.C.